Invention Grant
- Patent Title: Robot system and offset acquisition method
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Application No.: US17024543Application Date: 2020-09-17
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Publication No.: US11654578B2Publication Date: 2023-05-23
- Inventor: Masaya Yoshida , Hajime Nakahara , George Chin , Luc Nguyen
- Applicant: KAWASAKI JUKOGYO KABUSHIKI KAISHA , Kawasaki Robotics (USA), INC.
- Applicant Address: JP MI Kobe
- Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA,KAWASAKI ROBOTICS (USA), INC
- Current Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA,KAWASAKI ROBOTICS (USA), INC
- Current Assignee Address: JP Kobe; US MI Wixom
- Agency: Metrolex IP Law Group, PLLC
- Main IPC: B25J15/00
- IPC: B25J15/00 ; B25J11/00 ; H01L21/687 ; B25J9/16 ; B25J13/08

Abstract:
A robot system according to an embodiment may include a robot, a wafer jig that is held by the robot, a positioning base, a positional displacement detection device, a control part, and an offset acquisition part for acquiring an offset that occurs between a command position for the robot and an actual position. The positioning base includes contacting members. The wafer jig has a tapered surface. The tapered surface guides the wafer jig so that a center of the wafer jig approaches a predetermined position as a position where the taped surface contacts the contacting members is relatively higher. The robot places the wafer jig on the positioning base, then holds and conveys the wafer jig to the positional displacement detection device. The offset acquisition part acquires the offset based on a result in which the positional displacement detection device detects a positional displacement of the conveyed wafer jig.
Public/Granted literature
- US20220080604A1 ROBOT SYSTEM AND OFFSET ACQUISITION METHOD Public/Granted day:2022-03-17
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