Invention Grant
- Patent Title: Silicon carbide wafers with relaxed positive bow and related methods
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Application No.: US17178532Application Date: 2021-02-18
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Publication No.: US11654596B2Publication Date: 2023-05-23
- Inventor: Simon Bubel , Matthew Donofrio , John Edmond , Ian Currier
- Applicant: Wolfspeed, Inc.
- Applicant Address: US NC Durham
- Assignee: WOLFSPEED, INC.
- Current Assignee: WOLFSPEED, INC.
- Current Assignee Address: US NC Durham
- Agency: Dority & Manning, P.A.
- Main IPC: B28D5/00
- IPC: B28D5/00 ; H01L29/16

Abstract:
Silicon carbide (SiC) wafers and related methods are disclosed that include intentional or imposed wafer shapes that are configured to reduce manufacturing problems associated with deformation, bowing, or sagging of such wafers due to gravitational forces or from preexisting crystal stress. Intentional or imposed wafer shapes may comprise SiC wafers with a relaxed positive bow from silicon faces thereof. In this manner, effects associated with deformation, bowing, or sagging for SiC wafers, and in particular for large area SiC wafers, may be reduced. Related methods for providing SiC wafers with relaxed positive bow are disclosed that provide reduced kerf losses of bulk crystalline material. Such methods may include laser-assisted separation of SiC wafers from bulk crystalline material.
Public/Granted literature
- US20210170632A1 SILICON CARBIDE WAFERS WITH RELAXED POSITIVE BOW AND RELATED METHODS Public/Granted day:2021-06-10
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