Invention Grant
- Patent Title: Fabrication techniques and structures for gettering materials in ultrasonic transducer cavities
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Application No.: US16585283Application Date: 2019-09-27
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Publication No.: US11655141B2Publication Date: 2023-05-23
- Inventor: Jianwei Liu , Keith G. Fife , Joseph Lutsky , Lingyun Miao
- Applicant: BFLY OPERATIONS, INC.
- Applicant Address: US MA Burlington
- Assignee: BFLY OPERATIONS, INC.
- Current Assignee: BFLY OPERATIONS, INC.
- Current Assignee Address: US MA Burlington
- Agency: Osha Bergman Watanabe & Burton LLP
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81C1/00 ; H04R31/00 ; A61B8/00 ; G10K13/00 ; G10K11/28
Abstract:
A method of forming an ultrasound transducer device includes bonding a membrane to a substrate so as to form a sealed cavity between the membrane and the substrate. An exposed surface located within the sealed cavity includes a getter material that is electrically isolated from a bottom electrode of the cavity.
Information query
