Invention Grant
- Patent Title: Process for the generation of metal-containing films
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Application No.: US17710178Application Date: 2022-03-31
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Publication No.: US11655262B2Publication Date: 2023-05-23
- Inventor: David Dominique Schweinfurth , Lukas Mayr , Sinja Verena Klenk , Sabine Weiguny , Charles Hartger Winter , Kyle Blakeney , Nilanka Weerathunga Sirikkathuge , Tharindu Malawara Arachchige Nimanthaka Karunaratne
- Applicant: BASF SE , Wayne State University
- Applicant Address: DE MI Ludwigshafen am Rhein
- Assignee: BASF SE,Wayne State University
- Current Assignee: BASF SE,Wayne State University
- Current Assignee Address: DE MI Ludwigshafen am Rhein
- Agency: Armstrong Teasdale LLP
- Main IPC: C07F5/06
- IPC: C07F5/06 ; C23C16/08 ; C23C16/20 ; C23C16/455 ; C23C16/12
Abstract:
A process including bringing a solid substrate in contact with a compound of general formula (I), (II), (III), or (IV) in the gaseous state
where A is NR2 or OR with R being an alkyl group, an alkenyl group, an aryl group, or a silyl group,
E is NR or O,
n is 0, 1 or 2, m is 0, 1 or 2, and
R′ is hydrogen, an alkyl group, an alkenyl group, an aryl group, or a silyl group.
where A is NR2 or OR with R being an alkyl group, an alkenyl group, an aryl group, or a silyl group,
E is NR or O,
n is 0, 1 or 2, m is 0, 1 or 2, and
R′ is hydrogen, an alkyl group, an alkenyl group, an aryl group, or a silyl group.
Public/Granted literature
- US20220220131A1 PROCESS FOR THE GENERATION OF METAL-CONTAINING FILMS Public/Granted day:2022-07-14
Information query
