Invention Grant
- Patent Title: Precursor for chemical vapor deposition, and light-blocking container containing precursor for chemical vapor deposition and method for producing the same
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Application No.: US16617598Application Date: 2018-06-04
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Publication No.: US11655538B2Publication Date: 2023-05-23
- Inventor: Fumikazu Mizutani , Shintaro Higashi
- Applicant: KOJUNDO CHEMICAL LABORATORY CO., LTD.
- Applicant Address: JP Sakado
- Assignee: KOJUNDO CHEMICAL LABORATORY CO., LTD.
- Current Assignee: KOJUNDO CHEMICAL LABORATORY CO., LTD.
- Current Assignee Address: JP Sakado
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: JP 2017113957 2017.06.09
- International Application: PCT/JP2018/021318 2018.06.04
- International Announcement: WO2018/225668A 2018.12.13
- Date entered country: 2019-11-27
- Main IPC: C01G15/00
- IPC: C01G15/00 ; C23C16/455 ; C07F5/00 ; C23C16/40 ; H01B1/08 ; H01B13/00

Abstract:
A precursor for chemical vapor deposition (CVD), which is a precursor for producing an indium oxide thin film by chemical vapor deposition, can be stored for a long period, and is easy to handle upon use when chemical vapor deposition is carried out; and a method for storing the precursor. A precursor for chemical vapor deposition, characterized by containing an alkylcyclopentadienylindium (I) (C5H4R1—In) as a main component, also containing at least one component selected from alkylcyclopentediene (C5H5R2), dialkylcyclopentadiene ((C5H5R3)2), trisalkylcyclopentadienylindium (III) ((C5H4R4)3—In) and triscyclopentadienyl indium (III) as secondary components (wherein R1 to R4 independently represent an alkyl group having 1 to 4 carbon atoms), and containing substantially no solvents.
Public/Granted literature
Information query
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