Invention Grant
- Patent Title: Vacuum pump, and blade component, rotor, and stationary blade used therein
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Application No.: US16495009Application Date: 2018-03-19
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Publication No.: US11655830B2Publication Date: 2023-05-23
- Inventor: Manabu Nonaka , Hideki Enosawa
- Applicant: Edwards Japan Limited
- Applicant Address: JP Chiba
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Chiba
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Theodore M. Magee
- Priority: JP 2017056862 2017.03.23 JP 2017194834 2017.10.05 JP 2018046156 2018.03.14
- International Application: PCT/JP2018/010835 2018.03.19
- International Announcement: WO2018/174013A 2018.09.27
- Date entered country: 2019-09-17
- Main IPC: F04D19/04
- IPC: F04D19/04 ; F04D29/32 ; F04D29/70

Abstract:
A vacuum pump includes a plurality of exhaust stages provided between an inlet port and an exhaust port so as to function as means for exhausting gas molecules, and a number of blades provided between the inlet port and an uppermost exhaust stage of the plurality of exhaust stages so as to rotate together with a rotary blade that constitutes the uppermost exhaust stage as a particle transport stage for transporting particles in an exhaust direction of the gas molecules, the number being smaller than the number of rotary blades that constitutes the uppermost exhaust stage.
Public/Granted literature
- US20200271132A1 VACUUM PUMP, AND BLADE COMPONENT, ROTOR, AND STATIONARY BLADE USED THEREIN Public/Granted day:2020-08-27
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