Invention Grant
- Patent Title: Injection device, semiconductor testing system and its testing method
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Application No.: US17863681Application Date: 2022-07-13
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Publication No.: US11656275B2Publication Date: 2023-05-23
- Inventor: Bo-Lung Chen , Wen-Yuan Hsu
- Applicant: HERMES TESTING SOLUTIONS INC.
- Applicant Address: TW Hsinchu
- Assignee: HERMES TESTING SOLUTIONS INC.
- Current Assignee: HERMES TESTING SOLUTIONS INC.
- Current Assignee Address: TW Hsinchu
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW 8123824 2019.07.05
- The original application number of the division: US16597117 2019.10.09
- Main IPC: G01R31/317
- IPC: G01R31/317 ; G01N33/487 ; H01L21/67 ; H01L21/66

Abstract:
An injection device is disclosed herein. The injection device is utilized to inject a liquid onto a test area of a semiconductor element. The injection device includes a base, a reservoir, a first testing pipe, a cleaning pipe and a liquid-draining pipe. The reservoir set on the base is provided with at least one connecting port and a dropping port, wherein the dropping port is against the test area of the semiconductor element. The first testing pipe, the cleaning pipe and the liquid-draining pipe are connected to at least one connecting port, wherein a first liquid is injected from the first testing pipe into the reservoir, and wherein the a cleaning liquid is injected from the cleaning pipe into the reservoir to clean the reservoir and the test area. The dropping port is utilized to drain off the first testing liquid and the cleaning liquid in the reservoir. A semiconductor testing system utilizing the injection device and its testing method are also provided herein.
Public/Granted literature
- US20220349939A1 INJECTION DEVICE, SEMICONDUCTOR TESTING SYSTEM AND ITS TESTING METHOD Public/Granted day:2022-11-03
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