- Patent Title: Search device, searching method, and plasma processing apparatus
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Application No.: US16284879Application Date: 2019-02-25
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Publication No.: US11657059B2Publication Date: 2023-05-23
- Inventor: Yutaka Okuyama , Takeshi Ohmori , Masaru Kurihara , Hyakka Nakada
- Applicant: HITACHI HIGH-TECH CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge, P.C.
- Priority: JP 2018046238 2018.03.14
- Main IPC: H01J37/32
- IPC: H01J37/32 ; G06F16/2458 ; H01L21/67 ; G06N5/04 ; G06N20/00

Abstract:
A model learning unit learns a prediction model on the basis of learning data, a target setting unit sets a target output parameter value by interpolating between a goal output parameter value and an output parameter value which is the closest to the goal output parameter value in output parameter values in the learning data, a processing condition search unit estimates input parameter values which corresponds to the goal output parameter value and the target output parameter value, a model learning unit updates the prediction model by using a set of the estimated input parameter value and an output parameter value which is a result of processing that a processing device performs as additional learning data.
Public/Granted literature
- US20190286632A1 SEARCH DEVICE, SEARCHING METHOD, AND PLASMA PROCESSING APPARATUS Public/Granted day:2019-09-19
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