Invention Grant
- Patent Title: Conversion plate for reticle pod storage and a reticle pod storage system
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Application No.: US16659090Application Date: 2019-10-21
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Publication No.: US11658053B2Publication Date: 2023-05-23
- Inventor: Michael Raga-Barone
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Agent Francois Pagette
- Main IPC: H01L21/677
- IPC: H01L21/677 ; G03F7/20

Abstract:
One illustrative device disclosed herein includes a FOUP (Front Opening Unified Pod) storage bin, a plurality of pins positioned on a first surface of the FOUP storage bin, wherein the plurality of pins are adapted to engage and register with the FOUP, and a conversion plate. In one illustrative embodiment, the conversion plate includes a plate with a front surface and a back surface, a reticle pod receiving structure on the front surface that at least partially bounds a reticle pod receiving area on the front surface, and a pin engagement structure on the back side that is adapted to engage the plurality of pins on the first surface of the FOUP storage bin.
Public/Granted literature
- US20210118714A1 CONVERSION PLATE FOR RETICLE POD STORAGE AND A RETICLE POD STORAGE SYSTEM Public/Granted day:2021-04-22
Information query
IPC分类: