Conversion plate for reticle pod storage and a reticle pod storage system
Abstract:
One illustrative device disclosed herein includes a FOUP (Front Opening Unified Pod) storage bin, a plurality of pins positioned on a first surface of the FOUP storage bin, wherein the plurality of pins are adapted to engage and register with the FOUP, and a conversion plate. In one illustrative embodiment, the conversion plate includes a plate with a front surface and a back surface, a reticle pod receiving structure on the front surface that at least partially bounds a reticle pod receiving area on the front surface, and a pin engagement structure on the back side that is adapted to engage the plurality of pins on the first surface of the FOUP storage bin.
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