Invention Grant
- Patent Title: Thermal interconnect structure for thermal management of electrical interconnect structure
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Application No.: US17097441Application Date: 2020-11-13
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Publication No.: US11658092B2Publication Date: 2023-05-23
- Inventor: Shao-Kuan Lee , Cherng-Shiaw Tsai , Ting-Ya Lo , Cheng-Chin Lee , Chi-Lin Teng , Kai-Fang Cheng , Hsin-Yen Huang , Hsiao-Kang Chang , Shau-Lin Shue
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L23/373
- IPC: H01L23/373 ; H01L21/768 ; H01L23/48 ; H01L23/522 ; H01L23/532 ; H01L23/367

Abstract:
In some embodiments, the present disclosure relates to an integrated chip that includes an electrical interconnect structure, a thermal interconnect structure, and a thermal passivation layer over a substrate. The electrical interconnect structure includes interconnect vias and interconnect wires embedded within interconnect dielectric layers. The thermal interconnect structure is arranged beside the electrical interconnect structure and includes thermal vias, thermal wires, and/or thermal layers. Further, the thermal interconnect structure is embedded within the interconnect dielectric layers. The thermal passivation layer is arranged over a topmost one of the interconnect dielectric layers. The thermal interconnect structure has a higher thermal conductivity than the interconnect dielectric layers.
Public/Granted literature
- US20220157690A1 THERMAL INTERCONNECT STRUCTURE FOR THERMAL MANAGEMENT OF ELECTRICAL INTERCONNECT STRUCTURE Public/Granted day:2022-05-19
Information query
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