Invention Grant
- Patent Title: Semiconductor device with copper-manganese liner and method for forming the same
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Application No.: US17240287Application Date: 2021-04-26
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Publication No.: US11658115B2Publication Date: 2023-05-23
- Inventor: Chin-Ling Huang
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L23/525

Abstract:
The present disclosure provides a semiconductor device with a copper-manganese liner and a method for forming the semiconductor device. The semiconductor device includes a first electrode and a second electrode disposed in a first dielectric layer. The semiconductor device also includes a first liner separating the first electrode from the first dielectric layer. The semiconductor device further includes a fuse link disposed in the first dielectric layer. The fuse link is disposed between and electrically connected to the first electrode and the second electrode, and the fuse link and the first liner are made of copper-manganese (CuMn).
Public/Granted literature
- US20220344261A1 SEMICONDUCTOR DEVICE WITH COPPER-MANGANESE LINER AND METHOD FOR FORMING THE SAME Public/Granted day:2022-10-27
Information query
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