Invention Grant
- Patent Title: ESD protection device with deep trench isolation islands
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Application No.: US17035662Application Date: 2020-09-28
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Publication No.: US11658176B2Publication Date: 2023-05-23
- Inventor: Zaichen Chen , Akram A. Salman , Binghua Hu
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Andrew R. Ralston; Frank D. Cimino
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L27/02 ; H01L29/08 ; H01L29/10 ; H01L29/66 ; H01L21/265 ; H01L29/06 ; H01L29/732 ; H01L21/762 ; H01L21/768 ; H01L21/02 ; H01L21/321

Abstract:
An electronic device includes a substrate having a second conductivity type including a semiconductor surface layer with a buried layer (BL) having a first conductivity type. In the semiconductor surface layer is a first doped region (e.g., collector) and a second doped region (e.g., emitter) both having the first conductivity type, with a third doped region (e.g., a base) having the second conductivity type within the second doped region, wherein the first doped region extends below and lateral to the third doped region. At least one row of deep trench (DT) isolation islands are within the first doped region each including a dielectric liner extending along a trench sidewall from the semiconductor surface layer to the BL with an associated deep doped region extending from the semiconductor surface layer to the BL. The deep doped regions can merge forming a merged deep doped region that spans the DT islands.
Public/Granted literature
- US20210013193A1 ESD PROTECTION DEVICE WITH DEEP TRENCH ISOLATION ISLANDS Public/Granted day:2021-01-14
Information query
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