Invention Grant
- Patent Title: Packaging structure including a substrate having a coplanar waveguide, an air bridge and a superconducting material compensating structure formed thereon
-
Application No.: US17319870Application Date: 2021-05-13
-
Publication No.: US11658373B2Publication Date: 2023-05-23
- Inventor: Hua Xu , Jin Qin
- Applicant: ALIBABA GROUP HOLDING LIMITED
- Applicant Address: KY Grand Cayman
- Assignee: Alibaba Group Holding Limited
- Current Assignee: Alibaba Group Holding Limited
- Current Assignee Address: KY Grand Cayman
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: CN 2010403384.7 2020.05.13
- Main IPC: H01P3/00
- IPC: H01P3/00 ; H05K1/02

Abstract:
A packaging structure, a method of manufacturing a packaging structure, and a quantum processor include a substrate; a coplanar waveguide including a first ground wire, a second ground wire, and a signal wire, wherein the first ground wire, the second ground wire, and the signal wire are disposed on a surface of the substrate at intervals, and the signal wire is located between the first ground wire and the second ground wire; an air bridge including a first end connected with the first ground wire and a second end connected with the second ground wire, wherein a gap exists between the air bridge and a surface of the signal wire away from the substrate; and a compensation structure located on the surface of the substrate.
Public/Granted literature
- US20210359384A1 PACKAGING STRUCTURE, MANUFACTURING METHOD OF PACKAGING STRUCTURE, AND QUANTUM PROCESSOR Public/Granted day:2021-11-18
Information query