Invention Grant
- Patent Title: Memory structure and fabrication method thereof
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Application No.: US17028673Application Date: 2020-09-22
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Publication No.: US11659710B2Publication Date: 2023-05-23
- Inventor: Liang Han , Hai Ying Wang
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai; CN Beijing
- Agency: Anova Law Group, PLLC
- Priority: CN 1910986115.5 2019.10.16
- Main IPC: H01L27/11521
- IPC: H01L27/11521 ; H01L27/11558 ; H01L29/49

Abstract:
A memory structure and its fabrication method are provided in the present disclosure. The method includes providing a substrate, forming a plurality of discrete memory gate structures on the substrate where an isolation trench is between adjacent memory gate structures and a memory gate structure includes a floating gate layer and a control gate layer, forming an isolation layer in the isolation trench where a top surface of the isolation layer is lower than a top surface of the control gate layer and higher than a bottom surface of the control gate layer, forming an opening on an exposed sidewall of the control gate layer where a bottom of the opening is lower than or coplanar with the top surface of the isolation layer, and forming an initial metal silicide layer on an exposed surface of the control gate layer and the top surface of the isolation layer.
Public/Granted literature
- US20210118893A1 MEMORY STRUCTURE AND FABRICATION METHOD THEREOF Public/Granted day:2021-04-22
Information query
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