Invention Grant
- Patent Title: Sensor chip and force sensor device with increased fracture resistance
-
Application No.: US17644375Application Date: 2021-12-15
-
Publication No.: US11662261B2Publication Date: 2023-05-30
- Inventor: Shinya Yamaguchi
- Applicant: MINEBEA MITSUMI Inc.
- Applicant Address: JP Nagano
- Assignee: MINEBEA MITSUMI Inc.
- Current Assignee: MINEBEA MITSUMI Inc.
- Current Assignee Address: JP Nagano
- Agency: IPUSA, PLLC
- Priority: JP 2020215554 2020.12.24
- Main IPC: G01L1/18
- IPC: G01L1/18 ; G01L5/162

Abstract:
A sensor chip includes multiple sensing blocks each of which includes two or more T-patterned beam structures. Each T-patterned beam structure includes strain-detecting elements, at least one first detection beam, and a second detection beam extending from the first detection beam in a direction perpendicular to the first detection beam. Each T-patterned beam structure includes a connection portion formed by coupling ends of second detection beams in respective T-patterned structures, the connection portion including a force point portion. The sensor chip is configured to detect up to six axes relating to predetermined axial forces or moments around the predetermined axes, based on a change in an output of each of the strain-detecting elements, the output of each strain-detecting element changing in accordance with an input applied to a given force point portion.
Public/Granted literature
- US20220205856A1 SENSOR CHIP AND FORCE SENSOR DEVICE Public/Granted day:2022-06-30
Information query