Invention Grant
- Patent Title: Wafer handler cleaning tool
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Application No.: US16946890Application Date: 2020-07-10
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Publication No.: US11666951B2Publication Date: 2023-06-06
- Inventor: Heng-Wei Liao , Kuo-Hua Wang , Ming-Tsai Kuan
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Harrity & Harrity, LLP
- Main IPC: B08B1/00
- IPC: B08B1/00 ; B08B7/04 ; B08B5/04 ; H01L21/67 ; H01L21/687

Abstract:
A wafer handler cleaning tool may include a scraping device positioned near semiconductor equipment (e.g., a cooling plate, a semiconductor processing device, and/or the like) such that the scraping device removes foreign objects, debris, and/or other types of matter from the underside of the wafer handler when the wafer handler loads a wafer into the semiconductor equipment and/or unloads the wafer from the semiconductor equipment. Moreover, the wafer handler cleaning tool may include a negative pressure device to draw the removed foreign objects, debris, and/or other types of matter away from the scraping device and toward a filtration device such that the filtration device captures the removed foreign objects, debris, and/or other types of matter.
Public/Granted literature
- US20220008966A1 WAFER HANDLER CLEANING TOOL Public/Granted day:2022-01-13
Information query
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