Invention Grant
- Patent Title: Polishing apparatus and polishing method
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Application No.: US16162914Application Date: 2018-10-17
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Publication No.: US11667007B2Publication Date: 2023-06-06
- Inventor: Mitsunori Sugiyama , Taro Takahashi , Yoichi Kobayashi
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: JP 2017202620 2017.10.19
- Main IPC: B24B37/013
- IPC: B24B37/013 ; B24B37/12 ; B24B49/12 ; B24B57/02 ; B24B49/08 ; B24B37/10 ; B24B37/20 ; B24B27/00 ; H01L21/306

Abstract:
A polishing table holds a polishing pad. A top ring holds a semiconductor wafer. A swing arm holds the top ring. The swing arm swings around a swing center on the swing arm during polishing. An optical sensor is disposed on the polishing table and measures an optical characteristic changeable in accordance with a variation in film thickness of the semiconductor wafer. A fluid supply control apparatus determines a distance from an axis of rotation to the optical sensor when the semiconductor wafer is rotated by the top ring. An end point detection section detects a polishing end point indicating an end of polishing based on the optical characteristic measured by the optical sensor and the determined distance.
Public/Granted literature
- US20190118332A1 POLISHING APPARATUS AND POLISHING METHOD Public/Granted day:2019-04-25
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