Invention Grant
- Patent Title: Full-size mask assembly and manufacturing method thereof
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Application No.: US17459425Application Date: 2021-08-27
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Publication No.: US11668001B2Publication Date: 2023-06-06
- Inventor: Jung Ho Kim
- Applicant: KPS CO., LTD.
- Applicant Address: KR Hwaseong-si
- Assignee: KPS CO., LTD.
- Current Assignee: KPS CO., LTD.
- Current Assignee Address: KR Hwaseong-si
- Agency: Kile Park Reed & Houtteman PLLC
- Priority: KR 20180064033 2018.06.04
- Main IPC: C23C14/04
- IPC: C23C14/04 ; G03F7/20

Abstract:
Disclosed herein is a full-size mask assembly and a manufacturing method thereof. The full-size mask assembly according to an embodiment of the present invention includes a frame having a frame opening formed therein and a support surrounding the frame opening, a structural auxiliary mask supported by the support and having a plurality of shafts in a grid shape to form a plurality of structural auxiliary mask openings, and a plurality of cell unit masks supported by the structural auxiliary mask and each of which has a deposition pattern portion through which a deposition material passes.
Public/Granted literature
- US20210388479A1 FULL-SIZE MASK ASSEMBLY AND MANUFACTURING METHOD THEREOF Public/Granted day:2021-12-16
Information query
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