Invention Grant
- Patent Title: Thermistor element and electromagnetic wave sensor
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Application No.: US17540004Application Date: 2021-12-01
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Publication No.: US11668607B2Publication Date: 2023-06-06
- Inventor: Maiko Shirokawa , Shinji Hara , Naoki Ohta , Susumu Aoki , Eiji Komura
- Applicant: TDK CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TDK CORPORATION
- Current Assignee: TDK CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP 2020201818 2020.12.04
- Main IPC: G01J5/22
- IPC: G01J5/22 ; G01J5/0831 ; G01J5/20
Abstract:
A thermistor element includes a thermistor film, a first electrode provided in contact with one surface of the thermistor film, and a pair of second electrodes provided in contact with the other surface of the thermistor film, wherein the thermistor film includes an oxide having a spinel crystal structure and having a [111] preferred orientation in a film thickness direction.
Public/Granted literature
- US20220178759A1 THERMISTOR ELEMENT AND ELECTROMAGNETIC WAVE SENSOR Public/Granted day:2022-06-09
Information query
