Invention Grant
- Patent Title: High speed atomic force profilometry of large areas
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Application No.: US17223849Application Date: 2021-04-06
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Publication No.: US11668730B2Publication Date: 2023-06-06
- Inventor: Jason Osborne , Vladimir Fonoberov , Sean Michael Hand
- Applicant: Bruker Nano, Inc.
- Applicant Address: US CA Santa Barbara
- Assignee: Bruker Nano, Inc.
- Current Assignee: Bruker Nano, Inc.
- Current Assignee Address: US CA Santa Barbara
- Agency: Boyle Fredrickson S.C.
- Main IPC: G01Q60/30
- IPC: G01Q60/30 ; G01Q60/38 ; G01R1/067 ; G01Q10/06 ; G01Q20/02
Abstract:
An apparatus and method of operating an atomic force profiler (AFP), such as an AFM, using a feedforward control signal in subsequent scan lines of a large area sample to achieve large throughput advantages in, for example, automated applications.
Public/Granted literature
- US20210341513A1 High Speed Atomic Force Profilometry of Large Areas Public/Granted day:2021-11-04
Information query
