Invention Grant
- Patent Title: Injection device, micro light emitting diode inspection and repairing equipment and inspection and repairing method
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Application No.: US16726088Application Date: 2019-12-23
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Publication No.: US11668742B2Publication Date: 2023-06-06
- Inventor: Cheng-Cian Lin
- Applicant: PlayNitride Display Co., Ltd.
- Applicant Address: TW MiaoLi County
- Assignee: PlayNitride Display Co., Ltd.
- Current Assignee: PlayNitride Display Co., Ltd.
- Current Assignee Address: TW MiaoLi County
- Agency: JCIPRNET
- Priority: TW 8128874 2019.08.14
- Main IPC: G01R31/26
- IPC: G01R31/26 ; H01L21/683 ; H01L33/00 ; H01L21/66

Abstract:
Micro light emitting diode inspection and repairing equipment including a carrying stage, an optical inspection module and an injection device is provided. The optical inspection module is arranged corresponding to the carrying stage to capture image information and obtain a position coordinate from the image information. The injection device is adapted to move to a target position of the carrying stage according to the position coordinate. The injection device includes a tube and a nozzle. The tube includes a first portion and a second portion connected to the first portion. The extending direction of the first portion is different from the extending direction of the second portion. A fluid blows to the target position after passing through the tube and the nozzle. An inspection and repairing method adopting the micro light emitting diode inspection and repairing equipment is also provided.
Public/Granted literature
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