Invention Grant
- Patent Title: Control method of inspection apparatus and inspection apparatus
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Application No.: US17443359Application Date: 2021-07-26
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Publication No.: US11668747B2Publication Date: 2023-06-06
- Inventor: Naoki Akiyama , Hiroyuki Nakayama
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: IPUSA, PLLC
- Priority: JP 2020135238 2020.08.07
- Main IPC: G01R1/04
- IPC: G01R1/04 ; G01R31/308 ; G01R1/073 ; G01R1/02

Abstract:
A control method of an inspection apparatus including a mounting stage on which a substrate having a plurality of inspection objects is mounted, a plurality of sections being formed with respect to the mounting stage and a heater controllable to heat for each of the sections includes when inspecting a first inspection object to be inspected among the plurality of inspection objects, causing the heater to heat a section corresponding to the first inspection object and a section corresponding to a second inspection object to be inspected next.
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