Invention Grant
- Patent Title: Meta device and manufacturing method thereof
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Application No.: US17075007Application Date: 2020-10-20
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Publication No.: US11668962B2Publication Date: 2023-06-06
- Inventor: Sunil Kim , Changbum Lee , Byounglyong Choi
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR 20170131652 2017.10.11
- Main IPC: G02F1/03
- IPC: G02F1/03 ; G02F1/07 ; G02F1/015 ; G02B1/00 ; G02F1/29 ; G02F1/00 ; B82Y20/00 ; H01Q15/00

Abstract:
A beam steering apparatus may include: a mirror; a refractive index modulation layer disposed on the mirror; a nanoantenna on the refractive index modulation layer; and an insulating layer disposed between the nanoantenna and the refractive index modulation layer, wherein the insulating layer has a thickness distribution in which a first thickness of the insulating layer on a central region of the mirror is less than a second thickness of the insulating layer on an edge region of the mirror, wherein a refractive index of the refractive index modulation layer is modulated to control propagation direction of beam.
Public/Granted literature
- US20210033892A1 META DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2021-02-04
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