Invention Grant
- Patent Title: Temperature control device
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Application No.: US17311220Application Date: 2019-11-15
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Publication No.: US11669113B2Publication Date: 2023-06-06
- Inventor: Kazuhiro Mimura , Atsushi Kobayashi
- Applicant: KELK Ltd.
- Applicant Address: JP Kanagawa
- Assignee: KELK Ltd.
- Current Assignee: KELK Ltd.
- Current Assignee Address: JP Kanagawa
- Agency: Fish & Richardson P.C.
- Priority: JP 2018246199 2018.12.27
- International Application: PCT/JP2019/044978 2019.11.15
- International Announcement: WO2020/137245A 2020.07.02
- Date entered country: 2021-06-04
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G05D23/19 ; F24H15/414

Abstract:
A temperature control device includes a smoother including a smoothing channel through which fluid from a first inlet flows, and a first outlet from which the fluid flowed through the smoothing channel flows out, the smoother making a temperature fluctuation amount of the fluid in the first outlet smaller than that in the first inlet, a thermoregulator including a second inlet into which the fluid from the first outlet flows, a thermoregulating channel through which the fluid from the second inlet flows, a thermoregulating unit regulating a temperature of the fluid flowing through the thermoregulating channel, and a second outlet from which the fluid flowed through the thermoregulating channel flows out, calculating a temperature regulation amount of the thermoregulating unit, based on temperature of the fluid in the smoothing channel, and calculating the temperature regulation amount, based on temperature of the fluid at a position downstream of the second outlet.
Public/Granted literature
- US20220100215A1 TEMPERATURE CONTROL DEVICE Public/Granted day:2022-03-31
Information query
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