Invention Grant
- Patent Title: Transport apparatus and adapter pendant
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Application No.: US17158523Application Date: 2021-01-26
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Publication No.: US11670534B2Publication Date: 2023-06-06
- Inventor: Dana L. Atwood , Jairo Moura
- Applicant: Brooks Automation, Inc.
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation US, LLC
- Current Assignee: Brooks Automation US, LLC
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- The original application number of the division: US16029320 2018.07.06
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/687 ; G05B19/421 ; H01L21/67 ; B25J9/16 ; G05B19/042

Abstract:
A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the articulated arm.
Public/Granted literature
- US20210225685A1 TRANSPORT APPARATUS AND ADAPTER PENDANT Public/Granted day:2021-07-22
Information query
IPC分类: