Invention Grant
- Patent Title: Method of making a semiconductor arrangement
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Application No.: US17181464Application Date: 2021-02-22
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Publication No.: US11670539B2Publication Date: 2023-06-06
- Inventor: Ming-Che Lee , Sheng-Chau Chen , Cheng-Hsien Chou , Cheng-Yuan Tsai
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Cooper Legal Group, LLC
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L21/02

Abstract:
A method of making a semiconductor arrangement includes forming a first layer of molecular ions in a first wafer interface region of a first wafer, forming a second layer of molecular ions in a second wafer interface region of a second wafer, forming a first molecular bond connecting the first wafer interface region to the second wafer interface region by applying pressure to at least one of the first wafer or the second wafer in a direction toward the first wafer interface region and the second wafer interface region, and annealing the first wafer and the second wafer to form a second molecular bond connecting the first wafer interface region to the second wafer interface region.
Public/Granted literature
- US20220270918A1 METHOD OF MAKING A SEMICONDUCTOR ARRANGEMENT Public/Granted day:2022-08-25
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