Invention Grant
- Patent Title: Method to co-integrate SiGe and Si channels for finFET devices
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Application No.: US16426579Application Date: 2019-05-30
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Publication No.: US11670554B2Publication Date: 2023-06-06
- Inventor: Nicolas Loubet , Prasanna Khare , Qing Liu
- Applicant: Bell Semiconductor, LLC
- Applicant Address: US PA Bethlehem
- Assignee: Bell Semiconductor, LLC
- Current Assignee: Bell Semiconductor, LLC
- Current Assignee Address: US PA Bethlehem
- Agency: Mendelsohn Dunleavy, P.C.
- Agent Steve Mendelsohn
- The original application number of the division: US13907613 2013.05.31
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/8238 ; H01L21/3065 ; H01L21/308

Abstract:
A method for co-integrating finFETs of two semiconductor material types, e.g., Si and SiGe, on a bulk substrate is described. Fins for finFETs may be formed in an epitaxial layer of a first semiconductor type, and covered with an insulator. A portion of the fins may be removed to form voids in the insulator, and the voids may be filled by epitaxially growing a semiconductor material of a second type in the voids. The co-integrated finFETs may be formed at a same device level.
Public/Granted literature
- US20190279912A1 METHOD TO CO-INTEGRATE SiGe AND Si CHANNELS FOR FINFET DEVICES Public/Granted day:2019-09-12
Information query
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