Invention Grant
- Patent Title: Integrated inductor with a stacked metal wire
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Application No.: US17117288Application Date: 2020-12-10
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Publication No.: US11670583B2Publication Date: 2023-06-06
- Inventor: Yaojian Leng , Justin Sato
- Applicant: Microchip Technology incorporated
- Applicant Address: US AZ Chandler
- Assignee: Microchip Technology Incorporated
- Current Assignee: Microchip Technology Incorporated
- Current Assignee Address: US AZ Chandler
- Agency: Slayden Grubert Beard PLLC
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L23/532 ; H01F27/32 ; H01F27/28 ; H01L49/02

Abstract:
A low-resistance thick-wire integrated inductor may be formed in an integrated circuit (IC) device. The integrated inductor may include an elongated inductor wire defined by a metal layer stack including an upper metal layer, middle metal layer, and lower metal layer. The lower metal layer may be formed in a top copper interconnect layer, the upper metal layer may be formed in an aluminum bond pad layer, and the middle metal layer may comprise a copper tub region formed between the aluminum upper layer and copper lower layer. The wide copper region defining the middle layer of the metal layer stack may be formed concurrently with copper vias of interconnect structures in the IC device, e.g., by filling respective openings using copper electrochemical plating or other bottom-up fill process. The elongated inductor wire may be shaped in a spiral or other symmetrical or non-symmetrical shape.
Public/Granted literature
- US20210384122A1 INTEGRATED INDUCTOR WITH A STACKED METAL WIRE Public/Granted day:2021-12-09
Information query
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