Invention Grant
- Patent Title: Semiconductor substrate with passivated full deep-trench isolation and associated methods of manufacture
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Application No.: US17133553Application Date: 2020-12-23
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Publication No.: US11670662B2Publication Date: 2023-06-06
- Inventor: Cynthia Sun Yee Lee , Shiyu Sun
- Applicant: OmniVision Technologies, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: OmniVision Technologies, Inc.
- Current Assignee: OmniVision Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Cozen O'Connor
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
An image sensor with passivated full deep-trench isolation includes a semiconductor substrate, the substrate including a plurality of sidewalls that form a plurality of trenches that separates pixels of a pixel array, and a passivation layer lining the plurality of sidewall surfaces and the back surface of the semiconductor substrate. A method for forming an image sensor with passivated full deep-trench isolation includes forming trenches in a semiconductor substrate, filling the trenches with a sacrificial material, forming a plurality of photodiode regions, forming a circuit layer, thinning the semiconductor substrate, and removing the sacrificial material. A method for reducing noise in an image sensor includes removing material from a semiconductor substrate to form a plurality of trenches that extend from a front surface toward a back surface, and depositing a dielectric material onto the back surface and into the plurality of trenches through a back opening of each trench.
Public/Granted literature
- US20220199658A1 SEMICONDUCTOR SUBSTRATE WITH PASSIVATED FULL DEEP-TRENCH ISOLATION AND ASSOCIATED METHODS OF MANUFACTURE Public/Granted day:2022-06-23
Information query
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