Invention Grant
- Patent Title: High performance image sensor
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Application No.: US17236343Application Date: 2021-04-21
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Publication No.: US11670663B2Publication Date: 2023-06-06
- Inventor: Tung-Ting Wu , Jhy-Jyi Sze , Yimin Huang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L31/036

Abstract:
The present disclosure, in some embodiments, relates to an image sensing integrated chip. The image sensing integrated chip includes a semiconductor substrate having sidewalls defining one or more trenches on opposing sides of a region of the semiconductor substrate. One or more dielectrics are disposed within the one or more trenches. The semiconductor substrate has a plurality of flat surfaces arranged between the one or more trenches. Adjacent ones of the plurality of flat surfaces define a plurality of triangular shaped protrusions and alternative ones of the plurality of flat surfaces are substantially parallel to one another, as viewed along a cross-sectional view.
Public/Granted literature
- US20210265412A1 HIGH PERFORMANCE IMAGE SENSOR Public/Granted day:2021-08-26
Information query
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