Invention Grant
- Patent Title: Doping activation and ohmic contact formation in a SiC electronic device, and SiC electronic device
-
Application No.: US17226003Application Date: 2021-04-08
-
Publication No.: US11670685B2Publication Date: 2023-06-06
- Inventor: Simone Rascuná , Paolo Badalá , Anna Bassi , Gabriele Bellocchi
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT 2020000008167 2020.04.17
- Main IPC: H01L29/872
- IPC: H01L29/872 ; H01L29/16 ; H01L29/66

Abstract:
A method for manufacturing a SiC-based electronic device, that includes implanting, at a front side of a solid body of SiC having a conductivity of N type, dopant species of P type, thus forming an implanted region that extends in depth in the solid body starting from the front side and has a top surface co-planar with said front side; and generating a laser beam directed towards the implanted region in order to generate heating of the implanted region at temperatures comprised between 1500° C. and 2600° C. so as to form an ohmic contact region including one or more carbon-rich layers, for example graphene and/or graphite layers, in the implanted region and, simultaneously, activation of the dopant species of P type.
Public/Granted literature
- US20210328023A1 DOPING ACTIVATION AND OHMIC CONTACT FORMATION IN A SIC ELECTRONIC DEVICE, AND SIC ELECTRONIC DEVICE Public/Granted day:2021-10-21
Information query
IPC分类: