Invention Grant
- Patent Title: Vibrator device
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Application No.: US17584436Application Date: 2022-01-26
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Publication No.: US11671073B2Publication Date: 2023-06-06
- Inventor: Yosuke Itasaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP 2021011208 2021.01.27
- Main IPC: H03H9/05
- IPC: H03H9/05 ; H03H9/10 ; H03B5/04 ; H03B5/32 ; H03H9/19

Abstract:
A vibrator device includes a semiconductor substrate, a base, a vibrating element, and a lid. The semiconductor substrate has a first surface and a second surface which is in a front-back relationship with the first surface. The base includes an integrated circuit disposed on a first surface or a second surface. The vibrating element is electrically coupled to the integrated circuit and is disposed on the first surface side. The lid is joined to the base at a joining portion of the base to accommodate the vibrating element. The integrated circuit includes a passive element, and the passive element is disposed such that at least a part of the passive element overlaps with the joining portion in a plan view from a direction orthogonal to the first surface.
Public/Granted literature
- US20220239275A1 Vibrator Device Public/Granted day:2022-07-28
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