Invention Grant
- Patent Title: Electronic devices comprising adjoining oxide materials and related systems
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Application No.: US17013047Application Date: 2020-09-04
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Publication No.: US11672118B2Publication Date: 2023-06-06
- Inventor: Shyam Surthi , Richard J. Hill , Gurtej S. Sandhu , Byeung Chul Kim , Francois H. Fabreguette , Chris M. Carlson , Michael E. Koltonski , Shane J. Trapp
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L27/11582
- IPC: H01L27/11582

Abstract:
An electronic device comprising a cell region comprising stacks of alternating dielectric materials and conductive materials. A pillar region is adjacent to the cell region and comprises storage node segments adjacent to adjoining oxide materials and adjacent to a tunnel region. The storage node segments are separated by a vertical portion of the tunnel region. A high-k dielectric material is adjacent to the conductive materials of the cell region and to the adjoining oxide materials of the pillar region. Additional electronic devices are disclosed, as are methods of forming an electronic device and related systems.
Public/Granted literature
- US20220077176A1 ELECTRONIC DEVICES COMPRISING ADJOINING OXIDE MATERIALS AND RELATED METHODS AND SYSTEMS Public/Granted day:2022-03-10
Information query
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