- Patent Title: Semiconductor memory device including at least one channel post with a first curved portion and a second curved portion having different curvatures and method for fabricating the same
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Application No.: US16931048Application Date: 2020-07-16
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Publication No.: US11672122B2Publication Date: 2023-06-06
- Inventor: Sung Wook Jung
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si Gyeonggi-do
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: William Park & Associates Ltd.
- Priority: KR 20200047218 2020.04.20
- Main IPC: H01L27/11568
- IPC: H01L27/11568 ; H01L27/11582 ; H01L27/11565

Abstract:
A semiconductor memory device includes an electrode structure, a plurality of channel posts, and at least one gate separation layer. The electrode structure includes insulating interlayers and gate conductive layers which are alternately stacked. The channel posts are formed through the electrode structure. The gate separation layer is formed between the channel posts. The gate separation layer separates an uppermost gate conductive layer among the gate conductive layers. Each channel post among the channel posts adjacent to the gate separation layer has a gibbous moon shape in a planar view. The semiconductor memory device further includes a slit structure arranged at both sides of the gate separation layer. The slit structure is formed through the electrode structure. Each channel post among the channel posts adjacent to the slit structure has a gibbous moon shape in the planar view.
Public/Granted literature
- US20210327895A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2021-10-21
Information query
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