Invention Grant
- Patent Title: Semiconductor memory device including a memory cell array
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Application No.: US17007659Application Date: 2020-08-31
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Publication No.: US11672125B2Publication Date: 2023-06-06
- Inventor: Shigehiro Yamakita
- Applicant: Xioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: KIOXIA CORPORATION
- Current Assignee: KIOXIA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JP 2019192722 2019.10.23
- Main IPC: H10B43/50
- IPC: H10B43/50 ; H10B43/10 ; H10B43/40 ; G11C16/04 ; H10B43/27

Abstract:
A semiconductor memory device includes a substrate including a first region, as second region, a third region and a fourth regions, the first region including a memory cell array, the second region including a circuit for controlling the memory cell array, the third region separating the first region and the second region, and the fourth region surrounding the third region, a first transistor provided in the second region, a second transistor provided in the third region between the first region and the first transistor, a third transistor provided in the third region between the first transistor and the second transistor, and a first insulating layer including a first portion disposed above the first to third transistors, and a second portion disposed in contact with the substrate between the second transistor and the third transistor.
Public/Granted literature
- US20210126004A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-04-29
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