- Patent Title: Three-dimensional memory device and manufacturing method thereof
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Application No.: US17137768Application Date: 2020-12-30
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Publication No.: US11672126B2Publication Date: 2023-06-06
- Inventor: Chao-I Wu , Sai-Hooi Yeong , Yu-Ming Lin , Han-Jong Chia
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H10B51/20
- IPC: H10B51/20 ; H01L27/11597 ; H01L27/11587 ; H10B51/10

Abstract:
A three-dimensional memory device including first and second stacking structures and first and second conductive pillars is provided. The first stacking structure includes first stacking layers stacked along a vertical direction. Each first stacking layer includes a first gate layer, a first channel layer, and a first ferroelectric layer between the first gate and channel layers. The second stacking structure is laterally spaced from the first stacking structure and includes second stacking layers stacked along the vertical direction. Each second stacking layer includes a second gate layer, a second channel layer, and a second ferroelectric layer is between the second gate and channel layers. The first and second gate layers are disposed between the first and second ferroelectric layers, and the first and second conductive pillars extend along the vertical direction in contact respectively with the first and second channel layers.
Public/Granted literature
- US20210399014A1 THREE-DIMENSIONAL MEMORY DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2021-12-23
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