Invention Grant
- Patent Title: Memory device
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Application No.: US17147695Application Date: 2021-01-13
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Publication No.: US11672129B2Publication Date: 2023-06-06
- Inventor: Shoichi Kabuyanagi , Yuuichi Kamimuta , Masumi Saitoh , Marina Yamaguchi
- Applicant: Kioxia Corporation
- Applicant Address: JP Minato-ku
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP 2017181223 2017.09.21
- The original application number of the division: US15904655 2018.02.26
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L27/11507 ; H01L29/51 ; H01L27/24

Abstract:
A memory device according to an embodiment includes a first conductive layer; a second conductive layer; a ferroelectric layer provided between the first conductive layer and the second conductive layer and containing hafnium oxide; a paraelectric layer provided between the first conductive layer and the ferroelectric layer and containing a first oxide; and an oxide layer provided between the paraelectric layer and the ferroelectric layer and containing a second oxide having an oxygen area density lower than an oxygen area density of the first oxide.
Public/Granted literature
- US20210134814A1 MEMORY DEVICE Public/Granted day:2021-05-06
Information query
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