Invention Grant
- Patent Title: Display device comprises a concentration of fluorine provides first peak in first area and second peak in third area contained in the semiconductor layer
-
Application No.: US17373602Application Date: 2021-07-12
-
Publication No.: US11672146B2Publication Date: 2023-06-06
- Inventor: Jae Bum Han , Moon Sung Kim , Young Gil Park , Soo Im Jeong
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR 20200091423 2020.07.23
- Main IPC: H01L29/08
- IPC: H01L29/08 ; H01L27/32 ; G09G3/3233 ; H01L29/66 ; H01L27/12 ; H01L29/786

Abstract:
A display device includes: a substrate; and a semiconductor layer disposed on the substrate, and including a first area, a second area, and a third area that are sequentially positioned by dividing the semiconductor layer into three areas in a thickness direction of the semiconductor layer, wherein the semiconductor layer includes polycrystalline silicon, a concentration of fluorine contained in the semiconductor layer has a first peak value in the first area and a second peak value in the third area, and the first peak value of the concentration of the fluorine in the semiconductor layer is about 30% or less of the second peak value of the concentration of the fluorine in the semiconductor layer.
Public/Granted literature
- US20220028947A1 DISPLAY DEVICE Public/Granted day:2022-01-27
Information query
IPC分类: