Invention Grant
- Patent Title: Imprint apparatus and article manufacturing method
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Application No.: US16880160Application Date: 2020-05-21
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Publication No.: US11673313B2Publication Date: 2023-06-13
- Inventor: Kenji Yaegashi , Takamitsu Komaki
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP 2019099733 2019.05.28
- Main IPC: G03F7/20
- IPC: G03F7/20 ; B29C59/02 ; B29C35/08 ; B29C33/12 ; B29C33/42 ; G03F9/00 ; G03F7/00

Abstract:
An imprint apparatus brings an imprint material on a substrate including a first mark into contact with a mold including a second mark and cures the imprint material, thereby forming a cured product of the imprint material on the substrate. The apparatus includes a plurality of detectors used for alignment detection, and a controller configured to obtain a plurality of pieces of relative position information by detecting a relative position between the first mark and the second mark a plurality of times using the plurality of detectors in a state in which the imprint material is cured and a positional relationship between the substrate and the mold is maintained, and to calibrate, based on the plurality of pieces of relative position information, a plurality of detection processing operations each performed using each of the plurality of detectors.
Public/Granted literature
- US20200376739A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD Public/Granted day:2020-12-03
Information query
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