Invention Grant
- Patent Title: Piezoelectric device, liquid ejecting head, liquid ejecting apparatus, and method for producing piezoelectric device
-
Application No.: US17389595Application Date: 2021-07-30
-
Publication No.: US11673392B2Publication Date: 2023-06-13
- Inventor: Yasuhiro Itayama
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP 2020130137 2020.07.31
- Main IPC: B41J2/16
- IPC: B41J2/16 ; H01L41/047 ; B41J2/14
Abstract:
A piezoelectric device includes a diaphragm, a piezoelectric actuator, and an orientation layer between the diaphragm and the piezoelectric layer. The piezoelectric actuator has a first electrode, a piezoelectric layer, and a second electrode, with the first electrode, a piezoelectric layer, and a second electrode on the diaphragm. The orientation layer is a stack of two or more tiers.
Public/Granted literature
Information query
IPC分类:
