Invention Grant
- Patent Title: Stepped substrate coating composition containing compound having curable functional group
-
Application No.: US16647146Application Date: 2018-09-12
-
Publication No.: US11674051B2Publication Date: 2023-06-13
- Inventor: Hikaru Tokunaga , Takafumi Endo , Hiroto Ogata , Keisuke Hashimoto , Makoto Nakajima
- Applicant: NISSAN CHEMICAL CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NISSAN CHEMICAL CORPORATION
- Current Assignee: NISSAN CHEMICAL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP 2017175633 2017.09.13
- International Application: PCT/JP2018/033862 2018.09.12
- International Announcement: WO2019/054420A 2019.03.21
- Date entered country: 2020-03-13
- Main IPC: C09D163/00
- IPC: C09D163/00 ; G03F7/11 ; G03F7/20 ; G03F7/26 ; H01L21/027

Abstract:
A stepped substrate coating composition for forming a coating film having planarity on a substrate, including: a main agent and a solvent, the main agent containing a compound (A), a compound (B), or a mixture thereof, the compound (A) having a partial structure Formula (A-1) or (A-2):
and the compound (B) having at least one partial structure selected from Formulae (B-1)-(B-5), or having a partial structure including a combination of a partial structure of Formula (B-6) and a partial structure of Formula (B-7) or (B-8):
where the composition is cured by photoirradiation or by heating at 30° C.-300° C.; and the amount of the main agent in the solid content of the composition is 95%-100% by mass.
and the compound (B) having at least one partial structure selected from Formulae (B-1)-(B-5), or having a partial structure including a combination of a partial structure of Formula (B-6) and a partial structure of Formula (B-7) or (B-8):
where the composition is cured by photoirradiation or by heating at 30° C.-300° C.; and the amount of the main agent in the solid content of the composition is 95%-100% by mass.
Public/Granted literature
- US20210024773A1 STEPPED SUBSTRATE COATING COMPOSITION CONTAINING COMPOUND HAVING CURABLE FUNCTIONAL GROUP Public/Granted day:2021-01-28
Information query
IPC分类: