Invention Grant
- Patent Title: Out-of-plane hinge for micro and nanoelectromechanical systems with reduced non-linearity
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Application No.: US16716632Application Date: 2019-12-17
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Publication No.: US11674344B2Publication Date: 2023-06-13
- Inventor: Samer Dagher , Loic Joet
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR 73564 2018.12.20
- Main IPC: E05D3/06
- IPC: E05D3/06 ; B81B7/00 ; G01C19/56 ; G01P15/08 ; B81B3/00

Abstract:
A hinge for a microelectromechanical system includes a fixed part and a part movable relative to the fixed part along at least an out-of-plane direction, the hinge being intended to suspend the moving part from the fixed part. The hinge includes a first rigid part, a second part fixed to the first part at one end and intended to be anchored to the fixed part or the moving part. The second part deforms in bending in a first direction, two third parts are fixed to the first part and are anchored to the moving part or the fixed part, and the third parts deform in bending along a second direction orthogonal to the first direction.
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