In some embodiments, a method of operating a gas sensor includes setting power to a heater in contact with a MOx sensor to provide a temperature that is below a threshold temperature; holding the temperature below the threshold temperature for a period of time to reduce ozone concentration in a gas sample in contact with the MOx sensor; increasing power to the heater to increase the temperature of the MOx sensor to an operating temperature; acquiring resistance data from the MOx sensor at the operating temperature; and processing the resistance data to provide a result related the gas sample.