Invention Grant
- Patent Title: Film resistor and thin-film sensor with a piezoresistive layer
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Application No.: US16624716Application Date: 2018-06-18
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Publication No.: US11676743B2Publication Date: 2023-06-13
- Inventor: Bettina Milke , Bernhard Ostrick
- Applicant: TDK Electronics AG
- Applicant Address: DE Munich
- Assignee: TDK Electronics AG
- Current Assignee: TDK Electronics AG
- Current Assignee Address: DE Munich
- Agency: Slater Matsil, LLP
- Priority: DE 2017113401.8 2017.06.19
- International Application: PCT/EP2018/066099 2018.06.18
- International Announcement: WO2018/234233A 2018.12.27
- Date entered country: 2019-12-19
- Main IPC: G01L1/18
- IPC: G01L1/18 ; H01C7/00 ; G01L9/00 ; H01C17/065
Abstract:
A film resistor and a thin-film sensor are disclosed. In an embodiment a film resistor includes a piezoresistive layer including a first transition metal carbide.
Information query
