Invention Grant
- Patent Title: Cooling for a plasma-based reactor
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Application No.: US17601911Application Date: 2020-04-07
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Publication No.: US11676798B2Publication Date: 2023-06-13
- Inventor: John Stephen Drewery , Neil Martin Paul Benjamin
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Schwegman Lundberg & Woessner, P.A.
- International Application: PCT/US2020/027081 2020.04.07
- International Announcement: WO2020/210240A 2020.10.15
- Date entered country: 2021-10-06
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
In one embodiment, the disclosed apparatus is a heat-pipe cooling system that includes a conical structure having an upper portion that is truncated. The conical structure is configured to be formed above a dielectric window with the conical structure being configured to condense vapor from a heat-transfer fluid placed or formed within a volume formed between the dielectric window and the conical structure. At least one cooling coil is formed on an exterior portion of the conical structure. Other apparatuses and systems are disclosed.
Public/Granted literature
- US20220139671A1 COOLING FOR A PLASMA-BASED REACTOR Public/Granted day:2022-05-05
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