Invention Grant
- Patent Title: Protective sheet for use in processing wafer, handling system for wafer, and combination of wafer and protective sheeting
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Application No.: US16613570Application Date: 2017-05-18
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Publication No.: US11676833B2Publication Date: 2023-06-13
- Inventor: Karl Heinz Priewasser
- Applicant: DISCO Corporation
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- International Application: PCT/EP2017/061997 2017.05.18
- International Announcement: WO2018/210426A 2018.11.22
- Date entered country: 2019-11-14
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/304 ; H01L21/683 ; H01L21/78

Abstract:
A protective sheeting for use in processing a semiconductor-sized wafer includes a protective film and a cushioning layer attached to a back surface of the protective film. At least in a central area of the protective sheeting, no adhesive is applied to a front surface and a back surface of the protective sheeting, the central area having an outer diameter which is equal to or larger than an outer diameter of the semiconductor-sized wafer. Further, a protective sheeting for use in processing a wafer has a protective film and a cushioning layer attached to a back surface of the protective film, wherein, on an entire front surface and an entire back surface of the protective sheeting, no adhesive is applied. A handling system for a semiconductor-sized wafer and to a combination of a wafer and the protective sheeting are also described.
Public/Granted literature
Information query
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