Invention Grant
- Patent Title: Transistor having wrap-around source/drain contacts
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Application No.: US16291336Application Date: 2019-03-04
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Publication No.: US11677026B2Publication Date: 2023-06-13
- Inventor: Zhenxing Bi , Kangguo Cheng , Juntao Li , Peng Xu
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Robert Sullivan
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/417 ; H01L29/08 ; H01L29/06 ; H01L29/423 ; H01L29/66 ; H01L29/10 ; H01L21/02 ; H01L21/3213 ; H01L21/311 ; H01L21/265

Abstract:
Embodiments of the invention are directed to a method of forming a semiconductor device. A non-limiting example of the method includes performing fabrication operations to form a field effect transistor (FET) device on a substrate. The fabrication operations include forming a channel region over the substrate, forming a bottom conductive layer of a wrap-around source or drain (S/D) contact over the substrate, and forming a S/D region over the bottom conductive layer and adjacent to the channel region. The S/D region is communicatively coupled to the channel region and the bottom conductive layer.
Public/Granted literature
- US20200287039A1 TRANSISTOR HAVING WRAP-AROUND SOURCE/DRAIN CONTACTS Public/Granted day:2020-09-10
Information query
IPC分类: