Invention Grant
- Patent Title: Solidly-mounted transversely-excited film bulk acoustic resonator with recessed interdigital transducer fingers
-
Application No.: US17187029Application Date: 2021-02-26
-
Publication No.: US11677376B2Publication Date: 2023-06-13
- Inventor: Viktor Plesski
- Applicant: MURATA MANUFACTURING CO., LTD.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co, Ltd.
- Current Assignee: Murata Manufacturing Co, Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: ArentFox Schiff LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/02 ; H03H9/54 ; H03H9/13

Abstract:
Acoustic resonator devices, filters, and methods are disclosed. An acoustic resonator includes a substrate, a piezoelectric plate having front and back surfaces, and an acoustic Bragg reflector between a surface of the substrate and the back surface of the piezoelectric plate. An interdigital transducer (IDT) is formed on the front surface of the piezoelectric plate. The IDT is configured to excite a shear primary acoustic mode in the piezoelectric plate in response to a radio frequency signal applied to the IDT. All fingers of the IDT are disposed in a respective grooves in the piezoelectric plate.
Public/Granted literature
Information query