Invention Grant
- Patent Title: Plasma processing method and plasma processing apparatus
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Application No.: US17314632Application Date: 2021-05-07
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Publication No.: US11682543B2Publication Date: 2023-06-20
- Inventor: Joji Takayoshi
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Weihrouch IP
- Priority: JP 2020082134 2020.05.07
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A plasma processing method is provided. In the plasma processing method, plasma is generated inside a chamber. A DC voltage is applied to an edge ring disposed to surround a substrate while generating the plasma. A first voltage of the edge ring is acquired while applying the DC voltage. Then, the application of the DC voltage is stopped. A second voltage of the edge ring is acquired while stopping the application of the DC voltage. Then, a parameter for controlling the DC voltage is calculated based on the first voltage and the second voltage.
Public/Granted literature
- US20210351019A1 PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS Public/Granted day:2021-11-11
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