Invention Grant
- Patent Title: Memory device including self-aligned conductive contacts
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Application No.: US17127823Application Date: 2020-12-18
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Publication No.: US11682581B2Publication Date: 2023-06-20
- Inventor: Kar Wui Thong , Harsh Narendrakumar Jain , John Hopkins
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/522 ; H01L23/528 ; H01L23/535 ; H10B43/27 ; H10B41/27 ; H01L27/11582 ; H01L27/11556

Abstract:
Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes levels of conductive materials interleaved with levels of dielectric materials; memory cell strings including respective pillars extending through the levels of conductive materials and the levels of dielectric materials; a dielectric structure formed in a slit, the slit extending through the levels of conductive materials and the levels of dielectric materials, the dielectric structure separating the levels of conductive materials and the levels of dielectric materials into a first portion and a second portion; first conductive structures located over and coupled to respective pillars of the first memory cell strings; second conductive structures located over and coupled to respective pillars of the second memory cell strings; and a conductive line contacting the dielectric structure, a conductive structure of the first conductive structures, and a conductive structure of the second conductive structures.
Public/Granted literature
- US20220199467A1 MEMORY DEVICE INCLUDING SELF-ALIGNED CONDUCTIVE CONTACTS Public/Granted day:2022-06-23
Information query
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